Brooks Aligner Controller (Part Number: 001-4130-03) Overview

Brand Background

Brooks Automation is a global market leader in automation, vacuum technology, and robotic wafer handling solutions for the semiconductor manufacturing, life sciences, and high-tech industries. For decades, Brooks has engineered high-precision robotic systems, intelligent aligners, and specialized motion controllers designed for extreme positioning accuracy, ultra-clean vacuum environments, and long-term operating continuity in 24/7 semiconductor fabrication facilities worldwide.

Model Overview: Aligner Controller (Part Number: 001-4130-03)

The Brooks Aligner Controller (Part Number: 001-4130-03, also referenced as 001-4130) is a specialized Motion Control and Optoelectronic Processing Module designed specifically for integration into Brooks wafer aligner systems and vacuum or atmospheric robotic handling clusters.

Serving as a dedicated computational and axis-control node, this controller is engineered to process high-resolution optical sensor data, manage precise rotational and edge-detection routines, and execute motion profiles for semiconductor wafer pre-aligners. It ensures sub-millimeter centering accuracy, rapid notch/flat location, and robust synchronization with central robotic vacuum handlers.

001-4130-03

Key Technical Specifications and Parameters

• Manufacturer: Brooks Automation

• Model Name / Designation: Aligner Controller / Motion Processor Unit

• Part / Catalog Number: 001-4130-03 (001-4130)

• System Compatibility: Engineered for integration with Brooks wafer pre-aligner systems, vacuum/atmospheric robots, and cluster tool controllers

• Processing Architecture: High-reliability microelectronic circuitry designed for real-time optical edge sensing, motor commutation, and precise angular positioning calculation

• Interface & Communication: Specialized internal bus and serial/network communication ports for seamless data exchange with cluster tool main controllers and vacuum robots

• Form Factor: Ruggedized industrial printed circuit board (PCB) or modular controller assembly designed for secure installation within equipment electronics racks or robot control enclosures

Operating Industries

The Brooks Aligner Controller is deployed extensively across high-tech manufacturing sectors requiring ultra-clean, high-precision automated material handling:

• Semiconductor Manufacturing: 200mm and 300mm wafer fabrication facilities (fabs) utilized during photolithography, etching, deposition, and metrology steps.

• Flat Panel Display (FPD) Production: Automated handling and alignment systems for glass substrates and panels.

• Advanced Electronics & Data Storage: Cleanroom environments requiring contamination-free robotic transfer and precise substrate orientation.

Common Usage Scenarios

1. Semiconductor Wafer Pre-Alignment

   Processing optical sensor inputs to accurately detect wafer notches, flats, and eccentricities before transferring wafers into processing chambers.

2. Robotic Cluster Tool Coordination

   Managing communication and synchronization between the wafer aligner and central transfer robots to ensure high throughput and seamless wafer flow.

3. Semiconductor Equipment Maintenance and Retrofits

   Serving as a direct replacement component during fab maintenance, robotic module troubleshooting, or legacy Brooks aligner system overhauls to restore precise centering and positioning capabilities.