Description
Agilent 5517C | Two-Frequency Helium-Neon Laser Head
Product Introduction
In applications requiring extreme motion tracking speeds and sub-nanometer resolution—such as advanced semiconductor lithography steppers, flat-panel display manufacturing, and high-speed CNC machining—standard laser sources lack the dynamic bandwidth required. The Agilent 5517C is a high-performance, continuous-wave two-frequency helium-neon (HeNe) laser head engineered for demanding laser interferometer positioning architectures. Utilizing Zeeman splitting, it emits a coherent 633 nm beam split into two distinct, orthogonally polarized frequencies (f_1 and f_2), delivering roughly 75% higher maximum axis velocity capability than baseline entry models like the 5517A.
Housed in a compact industrial enclosure with a standardized 79.5 mm beam height, the 5517C features an internal thermally stabilized cavity design that guarantees long-term wavelength integrity once thermal equilibrium is reached. It supports various beam diameter configurations (standard 6 mm, alongside optical options like 3 mm and 9 mm) to fit diverse interferometer optics. Whether replacing a drifted light source on an inspection stage or servicing a legacy metrology tool, this unit integrates seamlessly into existing VME- and PC-based control platforms.
5517C
Key Technical Specifications
| Parameter | Specification Metric |
| Device Category | Two-Frequency Helium-Neon (HeNe) Laser Head |
| Nominal Vacuum Wavelength | 632.991354 nm |
| Wavelength Accuracy | \pm 0.1 ppm standard (\pm 0.02 ppm with factory calibration) |
| Wavelength Stability | \pm 2 ppb typical (1 hour); \pm 20 ppb lifetime |
| Reference Frequency | 2.4 to 3.0 MHz |
| Max Linear Axis Velocity | Up to 711 mm/s (depending on receiver electronics, e.g., E1709A) |
| Output Beam Diameter | 6 mm standard (Optional: 3 mm [Opt 003] or 9 mm [Opt 009]) |
| Beam Power Output | Minimum 180\ \muW, Maximum 1.0 mW |
| Input Power Requirements | +15 V\pm0.3 V at 2.5 A max; -15 V\pm0.3 V at 0.02 A max |
| Reliability (MTBF) | > 50,000 hours typical operating life |
| Operating Temperature | 0^\circC to +40^\circC standard industrial tier |
Application Scenarios & Pain Points
- Semiconductor Photolithography & Inspection Stages: High-speed wafer steppers and alignment tools require high reference frequencies to track rapid stage acceleration without losing fringe counts or dropping lock.
- Flat-Panel Display Manufacturing Lines: Large-format glass handling stages demand high-velocity linear feedback arrays that the 5517C handles natively.
- High-Performance Metrology & Calibration Rigs: Research labs and coordinate measuring setups rely on the laser’s tight 2 ppb hourly stability to maintain absolute length traceability.
QA & Live Testing SOP (Trust Signal)
We don’t inventory precision laser optics without verifying cavity lock stability and optical power output; every Agilent 5517C unit goes through our rigorous multi-point bench protocol:
- External Housing & Aperture Audit: Inspected under optical magnification for physical chassis integrity, clean output aperture shutter function, and uncompromised rear connector pins.
- Thermal Warm-Up & Cavity Lock Test: Powered via an authorized +15V / -15V metrology supply to monitor cavity tuning behavior, ensuring the internal thermal stabilization loop transitions cleanly from startup to a solid, non-flashing READY state.
- Optical Power & Frequency Verification: Measured using optical power meters and heterodyne detection setups to validate that minimum beam power output (> 180\ \muW) and reference frequency lock (2.4–3.0 MHz) meet factory thresholds.
- Protective Packaging: Enclosed in anti-static, shock-isolated cushioning inside heavy-duty multi-walled transit containers to protect internal plasma tube alignment from drop shock.
Field Engineer’s Pitfall Guide
- ❗ Class II Laser Safety Precautions: The 5517C emits visible coherent laser radiation (633 nm class II); never look directly into the beam aperture while the unit is energized.
- ❗ Allow Complete Thermal Stabilization: Do not rely on dimensional measurements immediately upon startup; allow the laser head a proper warm-up cycle (up to 90 minutes if utilizing an auxiliary cooling fan) to achieve full cavity thermal equilibrium.
- ❗ Power Supply Current Capacity: Because the 5517C draws up to 2.5 A on the +15V rail, ensure your system power supply (such as an Agilent 10884B or equivalent) is fully rated to handle the load without voltage sagging.
Intent-Driven FAQ
What is the main performance difference between the 5517B and 5517C?
The 5517C features a higher reference frequency (2.4 to 3.0 MHz) compared to the 5517B (1.9 to 2.4 MHz), enabling significantly higher maximum axis velocities (up to 711 mm/s vs. 538 mm/s) for fast-moving automation stages.
Can the Agilent 5517C be replaced by newer Keysight models?
Yes. Modern Keysight 5517C units maintain identical form factors, optical center heights (79.5 mm), and electrical pinouts, allowing direct drop-in replacement in legacy systems.
What does a flashing “READY” LED indicate on the rear panel?
A flashing ready indicator means the laser tube is still in its automatic tuning and thermal stabilization warm-up phase. Data measurements should only be taken once the LED transitions to a solid, continuous ON state.
What are the available beam diameter options for the 5517C?
While the standard model features a 6 mm beam diameter, the 5517C can be ordered with Option 003 (3 mm beam) or Option 009 (9 mm beam) to match specialized interferometer optics.
What kind of warranty covers this surplus laser head?
Every unit is backed by our comprehensive replacement guarantee, supported by pre-shipment optical power and frequency lock verification bench testing to ensure absolute reliability out of the box.
