Description
Applied Materials (AMAT) Part Number: 0010-23715
0010-23715
Applied Materials (AMAT) Part Number: 0010-23715
Part Details
- Manufacturer: Applied Materials (AMAT)
- Part Number:
0010-23715 - Description: Assembly, PMAX Emissometer (RTP Probe Assembly)
- Category: Semiconductor Fabrication Equipment Spare Part / Optical Sensor Assembly
Overview & System Integration
The 0010-23715 is a specialized PMAX Emissometer / Pyrometer Probe Assembly designed for Applied Materials Rapid Thermal Processing (RTP) modules and chambers.
In RTP semiconductor manufacturing systems (such as AMAT Centura, Endura, or standalone RTP platforms), precise non-contact wafer temperature measurement is critical. The PMAX emissometer probe measures radiation and emissivity to enable real-time, closed-loop temperature control during rapid thermal annealing, silicidation, and activation steps.
Core Specifications & Features
| Attribute | Specification |
| Manufacturer | Applied Materials (AMAT) |
| Part Number | 0010-23715 |
| Component Type | PMAX Emissometer Probe Assembly |
| Primary System | AMAT RTP (Rapid Thermal Processing) Chambers / PMAX Modules |
| Measurement Type | Non-contact optical/infrared wafer emissivity & temperature sensing |
| Complementary Parts | 0010-23716 (PMAX Pyrometer Probe Assembly) |
